Synthesis of TiO2 thin films on different substrates by chemical vapor deposition method

Duc Ta Hong, Quang Phan Ngoc, Thang Vu Viet, Thang Le Minh

Abstract


TiO2 thin films were synthesized by using Chemical Vapor Deposition (CVD) method on different substrates, such as glass, aluminium foil , and ceramic. The samples had been characterized by microscopy analysis, SEM, and EDS. The results show that TiO2 thin films were successfully fabricated and TiO2 nanocrystals with size of 50-100 nm loaded uniformly on surface of different substrates. The photocatalytic activities of all samples were investigated in photo-degradation of methyl orange (MO) under UV light irradiation and was followed by the UV-Vis diffuse reflectance spectroscopy, showing that the conversion of methyl orange achieved the highest percentage of 91% with TiO2 thin film synthesized on the ceramic substrate over 270 minutes of reaction. The hypothetical mechanism explaining this observation is that the surface morphology of ceramic plays a major role in the augmentation of MO molecules adsorption onto the surface of material, thus, improves the dye degradation process.


Keywords


TiO2 thin films; Chemical Vapor Deposition; Methyl orange; Photocatalysis

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References


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DOI: https://doi.org/10.51316/jca.2021.073

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